The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Apr. 05, 2010
Frank Sinclair, Quincy, MA (US);
Costel Biloiu, Rockport, MA (US);
Bon-woong Koo, Andover, MA (US);
Victor Benveniste, Lyle, WA (US);
Shardul Patel, North Reading, MA (US);
Frank Sinclair, Quincy, MA (US);
Costel Biloiu, Rockport, MA (US);
Bon-Woong Koo, Andover, MA (US);
Victor Benveniste, Lyle, WA (US);
Shardul Patel, North Reading, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
An RF ion source utilizing a heating/RF-shielding element for controlling the temperature of an RF window and to act as an RF shielding element for the RF ion source. When the heating/RF shielding element is in a heating mode, it suppresses formation of unwanted deposits on the RF window which negatively impacts the transfer of RF energy from an RF antenna to a plasma chamber. When the heating/RF-shielding element is in a shielding mode, it provides an electrostatic shielding for the RF ion source.