The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 07, 2013

Filed:

May. 26, 2008
Applicants:

Wataru Okase, Tokyo, JP;

Shuji Moriya, Tokyo, JP;

Tomohiro Nakata, Osaka, JP;

Tsutomu Shinohara, Osaka, JP;

Michio Yamaji, Osaka, JP;

Inventors:

Wataru Okase, Tokyo, JP;

Shuji Moriya, Tokyo, JP;

Tomohiro Nakata, Osaka, JP;

Tsutomu Shinohara, Osaka, JP;

Michio Yamaji, Osaka, JP;

Assignees:

Tokyo Electron Limited, Tokyo, JP;

Fujikin Incorporated, Osaka-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 11/10 (2006.01);
U.S. Cl.
CPC ...
Abstract

There is provided a fluid control apparatus which can reduce the number of members and can improve the assembling operation efficiency. A pressure indication deviceto be replaced with a relatively-higher frequency is coupled to a base blockexisting thereunder through male screw membersfrom above. An on-off valveto be replaced with a relatively-lower frequency has, at its lower portion, a block-shaped main bodyformed integrally therewith. The main bodyof the on-off valveis coupled to the base blockthrough male screw membersin the forward and rearward directions.


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