The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2013
Filed:
Oct. 06, 2010
Masahiro Hatakeyama, Tokyo, JP;
Shoji Yoshikawa, Tokyo, JP;
Kenichi Suematsu, Tokyo, JP;
Tsutomu Karimata, Tokyo, JP;
Nobuharu Noji, Tokyo, JP;
Masahiro Hatakeyama, Tokyo, JP;
Shoji Yoshikawa, Tokyo, JP;
Kenichi Suematsu, Tokyo, JP;
Tsutomu Karimata, Tokyo, JP;
Nobuharu Noji, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
An inspecting apparatus for reducing a time loss associated with a work for changing a detector is characterized by comprising a plurality of detectorsfor receiving an electron beam emitted from a sample W to capture image data representative of the sample W, and a switching mechanism M for causing the electron beam to be incident on one of the plurality of detectors, where the plurality of detectorsare disposed in the same chamber MC. The plurality of detectorscan be an arbitrary combination of a detector comprising an electron sensor for converting an electron beam into an electric signal with a detector comprising an optical sensor for converting an electron beam into light and converting the light into an electric signal. The switching mechanism M may be a mechanical moving mechanism or an electron beam deflector.