The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2013
Filed:
Jun. 15, 2010
Keigo Kasuya, Kokubunji, JP;
Takashi Ohshima, Saitama, JP;
Souichi Katagiri, Kodaira, JP;
Masashi Kimura, Tokai, JP;
Keigo Kasuya, Kokubunji, JP;
Takashi Ohshima, Saitama, JP;
Souichi Katagiri, Kodaira, JP;
Masashi Kimura, Tokai, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An electron gun that serves to reduce the quantity of electron stimulated desorption and accomplishes vacuum evacuation efficiently with a sufficient degree of vacuum. An electron sourceand an extraction electrodeare provided for emitting an electron beamfrom the electron source. A first vacuum chambercontaining the electron sourceis connected to a second vacuum chambervia an apertureprovided in the extraction electrode. Each vacuum chamber is differentially evacuated with an independent vacuum evacuation means, and the generation of electron stimulated desorption gasis reduced by securing a wide route of vacuum evacuation around the electron sourceand intercepting the procession of back scattered electronsemitted from the area with the electron beamon the extraction electrodeby using a shielding electrodegiven a prescribed potential.