The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2013
Filed:
May. 07, 2009
Daniel Jozef Maria Direcks, Simpelveld, NL;
Danny Maria Hubertus Philips, Son en Breugel, NL;
Clemens Johannes Gerardus Van Den Dungen, Eindhoven, NL;
Maikel Adrianus Cornelis Schepers, Nuenen, NL;
Paul Petrus Joannes Berkvens, Veldhoven, NL;
Koen Steffens, Veldhoven, NL;
Arnold Jan Van Putten, Eindhoven, NL;
Daniel Jozef Maria Direcks, Simpelveld, NL;
Danny Maria Hubertus Philips, Son en Breugel, NL;
Clemens Johannes Gerardus Van Den Dungen, Eindhoven, NL;
Maikel Adrianus Cornelis Schepers, Nuenen, NL;
Paul Petrus Joannes Berkvens, Veldhoven, NL;
Koen Steffens, Veldhoven, NL;
Arnold Jan Van Putten, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A fluid handling structure is disclosed in which the size and arrangement of the fluid extraction openings is specified in order to reduce the vibrations which are transmitted to the fluid handling structure as a result of two-phase extraction. The area of each fluid extraction opening and/or the total area of all of the fluid extraction openings and/or the space in between neighboring fluid extraction openings may be controlled. The reduction in vibrations increases the accuracy of the exposure.