The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2013
Filed:
Jul. 16, 2010
Khashayar Shadman, Mountain View, CA (US);
Robert Haynes, Pleasanton, CA (US);
Gabor D. Toth, San Jose, CA (US);
Christopher Sears, San Jose, CA (US);
Mehran Nasser Ghodsi, Hamilton, MA (US);
Khashayar Shadman, Mountain View, CA (US);
Robert Haynes, Pleasanton, CA (US);
Gabor D. Toth, San Jose, CA (US);
Christopher Sears, San Jose, CA (US);
Mehran Nasser Ghodsi, Hamilton, MA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
One embodiment relates to a charged-particle energy analyzer apparatus. A first mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a first electrode is arranged such that a first cavity is formed between the second side of the first mesh and the first electrode. A second mesh is arranged to receive the charged particles on a second side and pass the charged particles to a first side, and a second electrode is arranged such that a second cavity is formed between the first side of the second mesh and the second electrode. Finally, a third mesh is arranged to receive the charged particles on a first side and pass the charged particles to a second side, and a position-sensitive charged-particle detector is arranged to receive the charged particles after the charged particles pass through the third mesh.