The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2013
Filed:
Oct. 27, 2009
Hirohisa Takahashi, Sammu, JP;
Satoru Ishibashi, Sammu, JP;
Sadayuki Ukishima, Sammu, JP;
Masahide Matsubara, Matsudo, JP;
Satoshi Okabe, Kashiwa, JP;
Hirohisa Takahashi, Sammu, JP;
Satoru Ishibashi, Sammu, JP;
Sadayuki Ukishima, Sammu, JP;
Masahide Matsubara, Matsudo, JP;
Satoshi Okabe, Kashiwa, JP;
ULVAC, Inc., Chigasaki-Shi, JP;
Abstract
A solar cell manufacturing method according to the present invention is a solar cell manufacturing method that forms a transparent conductive film of ZnO as an electric power extracting electrode on a light incident side, the method comprises at least in a following order: a process A forming the transparent conductive film on a substrate by applying a sputtering voltage to sputter a target made of a film formation material for the transparent conductive film; a process B forming a texture on a surface of the transparent conductive film; a process C cleaning the surface of the transparent conductive film on which the texture has been formed using an UV/ozone; and a process D forming an electric power generation layer on the transparent conductive film.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile