The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Sep. 25, 2008
Koji Nakagawa, Kawasaki, JP;
Masaaki Muroi, Kawasaki, JP;
Shinichi Torigoe, Kawasaki, JP;
Fumihiro Nagaike, Kawasaki, JP;
Ryohei Nakamura, Kanazawa, JP;
Kenichi Higashi, Kanazawa, JP;
Tsuyoshi Gouda, Kanazawa, JP;
Koji Nakagawa, Kawasaki, JP;
Masaaki Muroi, Kawasaki, JP;
Shinichi Torigoe, Kawasaki, JP;
Fumihiro Nagaike, Kawasaki, JP;
Ryohei Nakamura, Kanazawa, JP;
Kenichi Higashi, Kanazawa, JP;
Tsuyoshi Gouda, Kanazawa, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
Intended is to reduce pressure fluctuations across a filter () for filtering a resist liquid. A charging apparatus is provided including a charge liquid tank () of resist liquid, a feed pump (), a charge nozzle (), a recovery passage (), a recovery valve () disposed in the recovery passage (), the filter (), and a control device () for controlling the servomotors to adjust the openings of the charge valve () and the recovery valve () so that the pressures on the upstream side and the downstream side of the filter () may not fluctuate.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile