The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Mar. 09, 2006
Masami Akimoto, Kikuchi-gun, JP;
Shinichi Hayashi, Kikuchi-gun, JP;
Yasushi Hayashida, Kikuchi-gun, JP;
Nobuaki Matsuoka, Kikuchi-gun, JP;
Yoshio Kimura, Kikuchi-gun, JP;
Issei Ueda, Kikuchi-gun, JP;
Hikaru Ito, Minato-ku, JP;
Masami Akimoto, Kikuchi-gun, JP;
Shinichi Hayashi, Kikuchi-gun, JP;
Yasushi Hayashida, Kikuchi-gun, JP;
Nobuaki Matsuoka, Kikuchi-gun, JP;
Yoshio Kimura, Kikuchi-gun, JP;
Issei Ueda, Kikuchi-gun, JP;
Hikaru Ito, Minato-ku, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A coating/developing device includes a processing block having a plurality of coating unit blocks stacked and a developing unit block stacked on the coating unit blocks. Each of the unit blocks is provided with a liquid processing unit for coating a liquid chemical on a substrate, a heating unit for heating the substrate, a cooling unit for cooling the substrate and a transfer unit for transferring the substrate between the units. The liquid processing unit is provided with a coating unit for coating a resist liquid on the substrate, a first bottom antireflection coating (BARC) forming unit for coating a liquid chemical for a BARC on the substrate before the resist liquid is coated thereon, and a second BARC forming unit for coating a liquid chemical for the BARC on the substrate after the resist liquid is coated thereon.