The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2013
Filed:
Mar. 07, 2007
Hui Chen, Burlingame, CA (US);
Sheshraj L. Tulshibagwale, Santa Clara, CA (US);
Hideshi Takahashi, Ryugasaki, JP;
Toshikazu Tomita, Chiba-ken, JP;
Takashi Fujikawa, Chiba, JP;
Hui Chen, Burlingame, CA (US);
Sheshraj L. Tulshibagwale, Santa Clara, CA (US);
Hideshi Takahashi, Ryugasaki, JP;
Toshikazu Tomita, Chiba-ken, JP;
Takashi Fujikawa, Chiba, JP;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In one aspect, a scrubber brush assembly is provided. The scrubber brush assembly includes (1) a cylindrical brush including exterior and interior surfaces; and (2) a sleeve having an exterior surface coupled to the interior surface of the scrubber brush and an interior surface. The exterior surface of the sleeve includes first coupling features adapted to prevent rotation of the sleeve relative to the brush. The scrubber brush assembly also includes a mandrel coupled to the interior surface of the sleeve. Numerous other aspects are provided.