The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2013
Filed:
Jun. 07, 2010
Danny Maria Hubertus Philips, Son en Breugel, NL;
Daniel Jozef Maria Direcks, Simpelveld, NL;
Maikel Adrianus Cornelis Schepers, Nuenen, NL;
Paul Petrus Joannes Berkvens, Veldhoven, NL;
Danny Maria Hubertus Philips, Son en Breugel, NL;
Daniel Jozef Maria Direcks, Simpelveld, NL;
Maikel Adrianus Cornelis Schepers, Nuenen, NL;
Paul Petrus Joannes Berkvens, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A fluid handling structure configured to supply and confine immersion liquid to a space defined between a projection system and a facing surface facing the fluid handling structure is disclosed. A first portion of an undersurface of the fluid handling structure, in use, is a different distance from the facing surface than a second portion of the undersurface. Further, the first portion has defined in it a supply opening configured to supply liquid toward the facing surface, and an extraction opening configured to remove fluid from between the fluid handling structure and the facing surface.