The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2013
Filed:
Sep. 04, 2009
Tomoyasu Shojo, Kokubunji, JP;
Muneyuki Fukuda, Kokubunji, JP;
Naomasa Suzuki, Hitachinaka, JP;
Noritsugu Takahashi, Kokubunji, JP;
Tomoyasu Shojo, Kokubunji, JP;
Muneyuki Fukuda, Kokubunji, JP;
Naomasa Suzuki, Hitachinaka, JP;
Noritsugu Takahashi, Kokubunji, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Disclosed herewith is a charged particle beam apparatus capable of controlling each of the probe current and the objective divergence angle to obtain a desired probe current and a desired objective divergence angle in accordance with the diameter of the subject objective aperture. The apparatus is configured to include an objective aperture between first and second condenser lenses to calculate and set a control value of a first condenser lens in accordance with the diameter of the hole of the objective aperture so as to obtain a desired probe current and calculate a control value of a second condenser lens setting device in accordance with the diameter of the hole of the objective divergence angle and the control value of the second condenser lens setting device, thereby setting the calculated control value for the second condenser lens setting device to control the objective divergence angle.