The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2013
Filed:
Sep. 12, 2012
Tomohiro Okumura, Kadoma, JP;
Yuichiro Sasaki, Machida, JP;
Satoshi Maeshima, Kobe, JP;
Ichiro Nakayama, Kadomi, JP;
Bunji Mizuno, Ikoma, JP;
Tomohiro Okumura, Kadoma, JP;
Yuichiro Sasaki, Machida, JP;
Satoshi Maeshima, Kobe, JP;
Ichiro Nakayama, Kadomi, JP;
Bunji Mizuno, Ikoma, JP;
Panasonic Corporation, Osaka, JP;
Abstract
With the evacuation of an interior of a vacuum chamber halted and with gas supply into the vacuum chamber halted, in a state that a mixed gas of helium gas and diborane gas is sealed in the vacuum chamber, a plasma is generated in a vacuum vessel and simultaneously a high-frequency power is supplied to a sample electrode. By the high-frequency power supplied to the sample electrode, boron is introduced to a proximity to a substrate surface.