The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2013
Filed:
Jul. 06, 2009
Applicants:
Sho Abe, Kawasaki, JP;
Daiju Shiono, Kawasaki, JP;
Tomoyuki Hirano, Kawasaki, JP;
Takahiro Dazai, Kawasaki, JP;
Inventors:
Sho Abe, Kawasaki, JP;
Daiju Shiono, Kawasaki, JP;
Tomoyuki Hirano, Kawasaki, JP;
Takahiro Dazai, Kawasaki, JP;
Assignee:
Tokyo Ohka Kogyo Co., Ltd., Kanagawa-ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/30 (2006.01); C08F 220/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
A negative resist composition including an alkali-soluble resin component (A), an acid generator component (B) that generates acid upon exposure, and a cross-linking component (C), the alkali-soluble resin component (A) including a polymeric compound (F) having a structural unit (f1) containing a base dissociable group and a structural unit (f2) containing a cross-linking group-containing group.