The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Aug. 24, 2010
Ting Fang Lim, Singapore, SG;
Chengyu Niu, The Colony, TX (US);
Olivier Le Neel, Singapore, SG;
Calvin Leung, Singapore, SG;
Ting Fang Lim, Singapore, SG;
Chengyu Niu, The Colony, TX (US);
Olivier Le Neel, Singapore, SG;
Calvin Leung, Singapore, SG;
STMicroelectronics PTE Ltd, Singapore, SG;
STMicroelectronics, Inc., Coppell, TX (US);
Abstract
The present disclosure is directed to a thin film resistor structure that includes a resistive element electrically connecting first conductor layers of adjacent interconnect structures. The resistive element is covered by a dielectric cap layer that acts as a stabilizer and heat sink for the resistive element. Each interconnect includes a second conductor layer over the first conductive layer. The thin film resistor includes a chromium silicon resistive element covered by a silicon nitride cap layer.