The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Dec. 20, 2007
Tadahiro Ohmi, Sendai, JP;
Tetsuya Goto, Sendai, JP;
Akinobu Teramoto, Sendai, JP;
Takaaki Matsuoka, Sendai, JP;
Tadahiro Ohmi, Sendai, JP;
Tetsuya Goto, Sendai, JP;
Akinobu Teramoto, Sendai, JP;
Takaaki Matsuoka, Sendai, JP;
National University Corporation Tohoku University, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
When positively charged ions are implanted into a target substrate, charge-up damage may occur on the target substrate. In order to suppress charge-up caused by secondary electrons emitted from the target substrate when positively charged ions are implanted, a conductive member is installed at a position facing the target substrate and electrically grounded with respect to a high frequency. Further, a field intensity generated in the target substrate may be reduced by controlling an RF power applied to the target substrate in pulse mode.