The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Nov. 30, 2010
Applicants:
Zhihua Zou, Chandler, AZ (US);
Liang Zhang, Chandler, AZ (US);
Sheng LI, Gilbert, AZ (US);
Tamil Selvamuniandy, Chandler, AZ (US);
Inventors:
Zhihua Zou, Chandler, AZ (US);
Liang Zhang, Chandler, AZ (US);
Sheng Li, Gilbert, AZ (US);
Tamil Selvamuniandy, Chandler, AZ (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/66 (2006.01); H01L 21/44 (2006.01); H01L 23/58 (2006.01); G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present disclosure relates to the field of microelectronic substrate fabrication and, more particularly, to alignment inspection for vias formed in the microelectronic substrates. The alignment inspection may be achieved by determining the relative positions of fluorescing and non-fluorescing elements in a microelectronic substrate.