The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2013
Filed:
Apr. 04, 2011
Shantinath Ghongadi, Wilsonville, OR (US);
Robert Rash, Portland, OR (US);
Jeff Hawkins, Portland, OR (US);
Seshasayee Varadarajan, Lake Owsego, OR (US);
Tariq Majid, Wilsonville, OR (US);
Kousik Ganesan, Hillsboro, OR (US);
Bryan Buckalew, Tualatin, OR (US);
Brian Evans, Elmira, OR (US);
Shantinath Ghongadi, Wilsonville, OR (US);
Robert Rash, Portland, OR (US);
Jeff Hawkins, Portland, OR (US);
Seshasayee Varadarajan, Lake Owsego, OR (US);
Tariq Majid, Wilsonville, OR (US);
Kousik Ganesan, Hillsboro, OR (US);
Bryan Buckalew, Tualatin, OR (US);
Brian Evans, Elmira, OR (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.