The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
Aug. 22, 2007
Applicants:
Hai Cong, Singapore, SG;
Wei Loong Loh, Singapore, SG;
Krishan Gopal, Singapore, SG;
Xin Zhang, Singapore, SG;
Mei Sheng Zhou, Singapore, SG;
Pradeep Ramachandramurthy Yelehanka, Singapore, SG;
Inventors:
Hai Cong, Singapore, SG;
Wei Loong Loh, Singapore, SG;
Krishan Gopal, Singapore, SG;
Xin Zhang, Singapore, SG;
Mei Sheng Zhou, Singapore, SG;
Pradeep Ramachandramurthy Yelehanka, Singapore, SG;
Assignee:
Globalfoundries Singapore Pte. Ltd., Singapore, SG;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/312 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for forming device features with reduced line end shortening (LES) includes trimming the device feature to achieve the desired sub-ground rule critical dimension during the etch to form the device feature.