The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2013
Filed:
Sep. 21, 2009
Applicants:
Gerard M. Schmid, Austin, TX (US);
Ian Matthew Mcmackin, Austin, TX (US);
Byung-jin Choi, Austin, TX (US);
Douglas J. Resnick, Leander, TX (US);
Inventors:
Gerard M. Schmid, Austin, TX (US);
Ian Matthew McMackin, Austin, TX (US);
Byung-Jin Choi, Austin, TX (US);
Douglas J. Resnick, Leander, TX (US);
Assignee:
Molecular Imprints, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Imprint lithography system may provide for an energy source for solidification of material positioned between a template and a substrate. Additionally, the energy source and/or an additional energy source may be used to clean contaminants from the template and/or the substrate.