The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2013
Filed:
Jul. 09, 2010
Bert Henning Freitag, Eindhoven, NL;
Georg Alexander Rosenthal, Kempen, DE;
Daniel Woodrow Phifer, Jr., Eindhoven, NL;
Bert Henning Freitag, Eindhoven, NL;
Georg Alexander Rosenthal, Kempen, DE;
Daniel Woodrow Phifer, Jr., Eindhoven, NL;
FEI Company, Hillsboro, OR (US);
Abstract
The invention describes a method for inspecting samples in an electron microscope. A sample carriershows electrodesconnecting padswith areas A on which the sample is to be placed. After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample. Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing. The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample.