The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2013
Filed:
Oct. 02, 2007
John P. Simons, Wappingers Falls, NY (US);
Kenneth J. Mccullough, Fishkill, NY (US);
Wayne M. Moreau, Wappingers Falls, NY (US);
John M. Cotte, New Fairfield, CT (US);
Keith R. Pope, Bedford, NH (US);
Charles J. Taft, Wappingers Falls, NY (US);
Dario L. Goldfarb, Mohegan Lake, NY (US);
John P. Simons, Wappingers Falls, NY (US);
Kenneth J. McCullough, Fishkill, NY (US);
Wayne M. Moreau, Wappingers Falls, NY (US);
John M. Cotte, New Fairfield, CT (US);
Keith R. Pope, Bedford, NH (US);
Charles J. Taft, Wappingers Falls, NY (US);
Dario L. Goldfarb, Mohegan Lake, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A surface cleaning apparatus comprising a chamber, and a thermal transfer device. The chamber is capable of holding a semiconductor structure therein. The thermal transfer device is connected to the chamber. The thermal transfer device has a surface disposed inside the chamber for contacting the semiconducting structure and controlling a temperature of the semiconductor structure in contact with the surface. The thermal transfer device has a thermal control module connected to the surface for heating and cooling the surface to thermally cycle the surface. The thermal control module effects a substantially immediate thermal response of the surface when thermally recycling the surface.