The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2013
Filed:
Jul. 13, 2010
David Malcolm Camm, Vancouver, CA;
Chee Chin, Maple Ridge, CA;
Rick Doolan, Burnaby, CA;
Tony Hewett, Richmond, CA;
Arne Kjorvel, Vancouver, CA;
Tony Komasa, Vancouver, CA;
Mike Krasnich, Richmond, CA;
Steve Mccoy, Burnaby, CA;
Joseph Reyers, Surrey, CA;
Igor Rudic, Vancouver, CA;
Ludmila Shepelev, Richmond, CA;
Greg Stuart, Burnaby, CA;
Tilman Thrum, Richmond, CA;
Alex Viel, Vancouver, CA;
David Malcolm Camm, Vancouver, CA;
Chee Chin, Maple Ridge, CA;
Rick Doolan, Burnaby, CA;
Tony Hewett, Richmond, CA;
Arne Kjorvel, Vancouver, CA;
Tony Komasa, Vancouver, CA;
Mike Krasnich, Richmond, CA;
Steve McCoy, Burnaby, CA;
Joseph Reyers, Surrey, CA;
Igor Rudic, Vancouver, CA;
Ludmila Shepelev, Richmond, CA;
Greg Stuart, Burnaby, CA;
Tilman Thrum, Richmond, CA;
Alex Viel, Vancouver, CA;
Mattson Technology, Inc., Freemont, CA (US);
Abstract
An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.