The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2013
Filed:
Jan. 09, 2012
Guido Soyez, Ludwigsburg, DE;
Stephan Back, Langenau, DE;
Joachim Buechele, Westhausen, DE;
Julian Kaller, Koenigsbronn, DE;
Guido Limbach, Aalen, DE;
Harald Woelfle, Waldkirch, DE;
Guido Soyez, Ludwigsburg, DE;
Stephan Back, Langenau, DE;
Joachim Buechele, Westhausen, DE;
Julian Kaller, Koenigsbronn, DE;
Guido Limbach, Aalen, DE;
Harald Woelfle, Waldkirch, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
Disclosed is a lens module, especially a projection lens for semiconductor lithography, comprising at least one replaceable optical element that is disposed in a lens housing. At least one gas exchange device is positioned in an area of the replaceable optical element in such a way that a receiving zone for the replaceable optical element can be flushed when the optical element is replaced.