The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Dec. 29, 2006
Thomas N. Horsky, Boxborough, MA (US);
Robert W. Milgate, Iii, Gloucester, MA (US);
George P. Sacco, Jr., Topsfield, MA (US);
Dale Conrad Jacobson, Salem, NH (US);
Wade Allen Krull, Marblehead, MA (US);
Thomas N. Horsky, Boxborough, MA (US);
Robert W. Milgate, III, Gloucester, MA (US);
George P. Sacco, Jr., Topsfield, MA (US);
Dale Conrad Jacobson, Salem, NH (US);
Wade Allen Krull, Marblehead, MA (US);
SemEquip, Inc., North Billerica, MA (US);
Abstract
Thermal control is provided for an extraction electrode of an ion-beam producing system that prevents formation of deposits and unstable operation and enables use with ions produced from condensable vapors and with ion sources capable of cold and hot operation. Electrical heating of the extraction electrode is employed for extracting decaborane or octadecaborane ions. Active cooling during use with a hot ion source prevents electrode destruction, permitting the extraction electrode to be of heat-conductive and fluorine-resistant aluminum composition.