The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
May. 25, 2011
Applicants:
Kuo-liang Sung, Toufen Township, Miaoli County, TW;
Cheng-hui Weng, Hsinchu, TW;
Inventors:
Kuo-Liang Sung, Toufen Township, Miaoli County, TW;
Cheng-Hui Weng, Hsinchu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01); H01L 21/00 (2006.01); H01L 21/38 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
Abstract
A monitor wafer for use in monitoring a preclean process and method of making same are described. One embodiment is a monitor wafer comprising a silicon base layer; a capping layer disposed on the silicon base layer; and a barrier layer disposed on the USG layer. The monitor wafer further comprises a copper ('Cu') seed layer disposed on the barrier layer; and a thick Cu layer disposed on the Cu seed layer.