The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2013
Filed:
Jul. 27, 2005
Kouichi Nagai, Kawasaki, JP;
Hitoshi Saito, Kawasaki, JP;
Kaoru Sugawara, Kawasaki, JP;
Makoto Takahashi, Kawasaki, JP;
Masahito Kudo, Kawasaki, JP;
Kazuhiro Asai, Kawasaki, JP;
Yukimasa Miyazaki, Kawasaki, JP;
Katsuhiro Sato, Kawasaki, JP;
Kaoru Saigoh, Kawasaki, JP;
Kouichi Nagai, Kawasaki, JP;
Hitoshi Saito, Kawasaki, JP;
Kaoru Sugawara, Kawasaki, JP;
Makoto Takahashi, Kawasaki, JP;
Masahito Kudo, Kawasaki, JP;
Kazuhiro Asai, Kawasaki, JP;
Yukimasa Miyazaki, Kawasaki, JP;
Katsuhiro Sato, Kawasaki, JP;
Kaoru Saigoh, Kawasaki, JP;
Fujitsu Semiconductor Limited, Yokohama, JP;
Abstract
After a ferroelectric capacitor is formed, an Al wiring (conductive pad) connected to the ferroelectric capacitor is formed. Then, a silicon oxide film and a silicon nitride film are formed around the Al wiring. Thereafter, as a penetration inhibiting film which inhibits penetration of moisture into the silicon oxide film, an AlOfilm is formed.