The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2013
Filed:
Jun. 30, 2006
Applicants:
Osamu Iizuka, Shizuoka, JP;
Kiyoshi Hattori, Tokyo, JP;
Inventors:
Osamu Iizuka, Shizuoka, JP;
Kiyoshi Hattori, Tokyo, JP;
Assignee:
NuFlare Technology, Inc., Numazu-shi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for correcting drifts of an electron beam, includes periodically correcting drift of the electron beam once per time period while varying the time period in length, and correcting, in addition to the correction per time period, the drift of the electron beam regardless of elapse of said time period when a change in value of a specified disturbance factor occurs with a prespecified change amount.