The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2013
Filed:
Oct. 08, 2010
Applicants:
Johan Joost Koning, The Hague, NL;
Stijn Willem Herman Steenbrink, The Hague, NL;
Bart Schipper, Nijkerk, NL;
Inventors:
Johan Joost Koning, The Hague, NL;
Stijn Willem Herman Steenbrink, The Hague, NL;
Bart Schipper, Nijkerk, NL;
Assignee:
Mapper Lithography IP B.V., Delft, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/12 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention relates to a projection lens assembly module for directing a multitude of charged particle beamlets onto an image plane located in a downstream direction, and a method for assembling such a projection lens assembly. In particular the present invention discloses a modular projection lens assembly with enhanced structural integrity and/or increased placement precision of its most downstream electrode.