The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2013
Filed:
Feb. 09, 2006
Applicants:
Dror Shemesh, Hod Hasharon, IL;
Michal Eilon, Beit Elazari, IL;
Hen Doozli, Nes Ziona, IL;
Ekaterina Rechav, Rehovot, IL;
Eitan Binyamini, Tel-Aviv, IL;
Inventors:
Dror Shemesh, Hod Hasharon, IL;
Michal Eilon, Beit Elazari, IL;
Hen Doozli, Nes Ziona, IL;
Ekaterina Rechav, Rehovot, IL;
Eitan Binyamini, Tel-Aviv, IL;
Assignee:
Applied Materials, Israel, Ltd., Rehovot, IL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2006.01); H01L 21/66 (2006.01); B08B 3/00 (2006.01); B08B 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for evaluating a cleanliness of a tool, the method includes: receiving a wafer; cleaning the wafer; placing the wafer into the tool for a predefined period; removing the wafer from the tool, performing a contact angle measurement and determining the cleanliness of the wafer.