The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Nov. 30, 2010
Applicant:
Katsuhiko Nakai, Yamaguchi, JP;
Inventor:
Katsuhiko Nakai, Yamaguchi, JP;
Assignee:
Siltronic AG, Munich, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/04 (2006.01); H01L 21/322 (2006.01); H01L 21/84 (2006.01);
U.S. Cl.
CPC ...
Abstract
A silicon wafer includes BMDs with a diagonal length of from 10 nm to 50 nm, and has a density of BMD which exists at a depth of 50 μm and deeper from the surface of the silicon wafer which is greater than or equal to 1×10/cm, and a ratio of the {111} plane of the BMD to the total planes surrounding the BMD, as an indication of the morphology of the BMD, is less than or equal to 0.3.