The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Feb. 27, 2009
Wen Dar Liu, Chupei, TW;
Yi Chia Lee, Danshu, TW;
Archie Liao, Taipei, TW;
Madhukar Bhaskara Rao, Fogelsville, PA (US);
Matthew I. Egbe, West Norriton, PA (US);
Chimin Sheu, Taipei, TW;
Michael Walter Legenza, Bellingham, MA (US);
Wen Dar Liu, Chupei, TW;
Yi Chia Lee, Danshu, TW;
Archie Liao, Taipei, TW;
Madhukar Bhaskara Rao, Fogelsville, PA (US);
Matthew I. Egbe, West Norriton, PA (US);
Chimin Sheu, Taipei, TW;
Michael Walter Legenza, Bellingham, MA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
The present invention, in a preferred embodiment, is a photoresist stripper formulation, comprising: Hydroxylamine ; Water; a solvent selected from the group consisting of dimethylsulfoxide; N-methylpyrrrolidine; dimethylacetamide; dipropylene glycol monomethyl ether; monoethanolamine and mixtures thereof; a base selected from the group consisting of choline hydroxide, monoethanolamine, tetramethylammonium hydroxide; aminoethylethanolamine and mixtures thereof; a metal corrosion inhibitor selected from the group consisting of catechol, gallic acid, lactic acid, benzotriazole and mixtures thereof; and a bath life extending agent selected from the group consisting of glycerine, propylene glycol and mixtures thereof. The present invention is also a method for using formulations as exemplified in the preferred embodiment.