The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2013
Filed:
Nov. 12, 2010
Andrew R. Wank, Avondale, PA (US);
Donna M. Alden, Bear, DE (US);
Mark E. Gazze, Lincoln University, PA (US);
Robert Gargione, Middletown, DE (US);
Joseph K. SO, Wilmington, DE (US);
David Drop, West Grove, PA (US);
Mai Tieu Banh, Oakville, CA;
Shawn Riley, Wilmington, DE (US);
Andrew R. Wank, Avondale, PA (US);
Donna M. Alden, Bear, DE (US);
Mark E. Gazze, Lincoln University, PA (US);
Robert Gargione, Middletown, DE (US);
Joseph K. So, Wilmington, DE (US);
David Drop, West Grove, PA (US);
Mai Tieu Banh, Oakville, CA;
Shawn Riley, Wilmington, DE (US);
Rohm and Haas Electronic Materials CMP Holdings, Inc., Newark, DE (US);
Abstract
The invention provides a plurality of polymeric particles embedded with silicate that include gas-filled polymeric microelements. The gas-filled polymeric microelements have a shell and a density of 5 g/liter to 200 g/liter. The shell having an outer surface and a diameter of 5 μm to 200 μm with silicate particles embedded in the polymer. The silicate particles have an average particle size of 0.01 to 3 μm. The silicate-containing regions are spaced to coat less than 50 percent of the outer surface of the polymeric microelements; and less than 0.1 weight percent total of the polymeric microelements is associated with i) silicate particles having a particle size of greater than 5 μm; ii) silicate-containing regions covering greater than 50 percent of the outer surface of the polymeric microelements; and iii) polymeric micro elements agglomerated with silicate particles to an average cluster size of greater than 120 μm.