The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2013
Filed:
Dec. 04, 2009
Wenbing Yun, Walnut Creek, CA (US);
Ying Xu, San Ramon, CA (US);
Frederick W. Duewer, Albany, CA (US);
Mason Freed, Pleasant Hill, CA (US);
Chao-chih Hsu, Pleasant Hill, CA (US);
Wenbing Yun, Walnut Creek, CA (US);
Ying Xu, San Ramon, CA (US);
Frederick W. Duewer, Albany, CA (US);
Mason Freed, Pleasant Hill, CA (US);
Chao-chih Hsu, Pleasant Hill, CA (US);
Xradia, Inc., Pleasanton, CA (US);
Abstract
The position of the sample is measured and used to correct for any off-axis motion during tomography using x-ray projection microscope system with a rotation stage system. The position is sensed using a precision-machined, low-CTE gold-coated cylinder or disc and three to five capacitive distance sensors. The correction can then be performed purely as image processing in software, by applying an appropriate shift in X and Y of the captured x-ray projections. A calibration is often necessary for each system (gold disc plus sensors plus sample stage) to account for any machining errors of the gold disc or positioning errors of the capacitive sensors. This calibration should also be repeated whenever any maintenance is performed on the metrology setup.