The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2013
Filed:
May. 06, 2009
Daniel Jozef Maria Direcks, Simpelveld, NL;
Danny Maria Hubertus Philips, Son en Breugel, NL;
Clemens Johannes Gerardus Van Den Dungen, Eindhoven, NL;
Koen Steffens, Veldhoven, NL;
Arnold Jan Van Putten, Eindhoven, NL;
Daniel Jozef Maria Direcks, Simpelveld, NL;
Danny Maria Hubertus Philips, Son en Breugel, NL;
Clemens Johannes Gerardus Van Den Dungen, Eindhoven, NL;
Koen Steffens, Veldhoven, NL;
Arnold Jan Van Putten, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A fluid handling structure is disclosed in which measures are taken to increase the speed at which meniscus breakdown occurs. Measures include the shape of a plurality of fluid extraction openings and the shape and density of a plurality of fluid supply openings in the fluid handling structure.