The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2013
Filed:
Oct. 21, 2010
Stephan Kronholz, Dresden, DE;
Markus Lenski, Dresden, DE;
Andy Wei, Dresden, DE;
Martin Gerhardt, Dresden, DE;
Stephan Kronholz, Dresden, DE;
Markus Lenski, Dresden, DE;
Andy Wei, Dresden, DE;
Martin Gerhardt, Dresden, DE;
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
When forming the strain-inducing semiconductor alloy in one type of transistor of a sophisticated semiconductor device, superior thickness uniformity of a dielectric cap material of the gate electrode structures may be achieved by forming encapsulating spacer elements on each gate electrode structure and providing an additional hard mask material. Consequently, in particular, in sophisticated replacement gate approaches, the dielectric cap material may be efficiently removed in a later manufacturing stage, thereby avoiding any irregularities upon replacing the semiconductor material by an electrode metal.