The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Sep. 21, 2010
Arvind Kumar, Hopewell Junction, NY (US);
Anthony I-chih Chou, Hopewell Junction, NY (US);
Shreesh Narasimha, Hopewell Junction, NY (US);
Arvind Kumar, Hopewell Junction, NY (US);
Anthony I-Chih Chou, Hopewell Junction, NY (US);
Shreesh Narasimha, Hopewell Junction, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An apparatus and method for electrical mask inspection is disclosed. A scan chain is formed amongst two metal layers and a via layer. One of the three layers is a functional layer under test, and the other two layers are test layers. A resistance measurement of the scan chain is used to determine if a potential defect exists within one of the vias or metal segments comprising the scan chain.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile