The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2013
Filed:
Sep. 14, 2010
Applicants:
Qing Min Wang, North Andover, MA (US);
Deodatta Vinayak Shenai-khatkhate, Danvers, MA (US);
Huazhi LI, Somerville, MA (US);
Inventors:
Qing Min Wang, North Andover, MA (US);
Deodatta Vinayak Shenai-Khatkhate, Danvers, MA (US);
Huazhi Li, Somerville, MA (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C23C 18/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods of vapor depositing metal-containing films using certain organometallic compounds containing a carbonyl-containing ligand are disclosed.