The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Aug. 07, 2009
Barbara Fong Chin Lim, Singapore, SG;
Keng Heng Lai, Singapore, SG;
Tanya Yang, Singapore, SG;
Victor Seng Keong Lim, Singapore, SG;
Fang Hong GN, Singapore, SG;
Liang Choo Hsia, Singapore, SG;
Barbara Fong Chin Lim, Singapore, SG;
Keng Heng Lai, Singapore, SG;
Tanya Yang, Singapore, SG;
Victor Seng Keong Lim, Singapore, SG;
Fang Hong Gn, Singapore, SG;
Liang Choo Hsia, Singapore, SG;
GLOBALFOUNDRIES Singapore Pte. Ltd., Singapore, SG;
Abstract
A method of forming a device is presented. The method includes providing a substrate containing at least a partially formed device thereon. The device comprises at least one defect site. A pixilated image of the defect site is acquired, and each pixel comprises a grey level value (GLV). Surrounding noises of the defect site is eliminated. A point of the image is identified as the center of the defect. A plurality of iterations to exclude outer edge pixels surrounding the center of the defect image is performed. The defect is categorized as a killer or non-killer defect.