The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Jul. 08, 2010
Dexter Tan, Singapore, SG;
Kin Leong Pey, Singapore, SG;
Sai Hooi Yeong, Singapore, SG;
Yoke King Chin, Singapore, SG;
Kuang Kian Ong, Singapore, SG;
Chee Mang NG, Singapore, SG;
Dexter Tan, Singapore, SG;
Kin Leong Pey, Singapore, SG;
Sai Hooi Yeong, Singapore, SG;
Yoke King Chin, Singapore, SG;
Kuang Kian Ong, Singapore, SG;
Chee Mang Ng, Singapore, SG;
GLOBALFOUNDRIES Singapore Pte. Ltd., Singapore, SG;
Nanyang Technological University, Singapore, SG;
Abstract
Embodiments relate to a method for fabricating nano-wires in nano-devices, and more particularly to nano-device fabrication using end-of-range (EOR) defects. In one embodiment, a substrate with a surface crystalline layer over the substrate is provided and EOR defects are created in the surface crystalline layer. One or more fins with EOR defects embedded within is formed and oxidized to form one or more fully oxidized nano-wires with nano-crystals within the core of the nano-wire.