The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2012
Filed:
Apr. 08, 2009
Yasushi Fujii, Kanagawa, JP;
Takuma Hasegawa, Kanagawa, JP;
Yasushi Fujii, Kanagawa, JP;
Takuma Hasegawa, Kanagawa, JP;
Tokyo Ohka Kogyo Co., Ltd., Kanagawa, JP;
Abstract
A stage is provided on which is mounted a substrate that has a concavo-convex portion such as a circuit formed on the underside thereof. A channelthrough which a coolant such as water flows is formed in a stage. An annular flange portionis formed on the top surface of the stage. The inner side of the flange portionforms a concave portion. The top surface of the flange portionis provided with a smooth finish in order to mount a peripheral section of the underside of a substrate W thereon. Holes through which are passed three positioning pinsand lift pinsare provided in the flange portionat regular intervals in the circumferential direction.