The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2012
Filed:
Feb. 05, 2009
Gary Peter Widdowson, Hong Kong, CN;
Wai Chuen Gan, Hong Kong, CN;
Cheuk Wah Tang, Hong Kong, CN;
Chor Fai Wong, Hong Kong, CN;
Gary Peter Widdowson, Hong Kong, CN;
Wai Chuen Gan, Hong Kong, CN;
Cheuk Wah Tang, Hong Kong, CN;
Chor Fai Wong, Hong Kong, CN;
ASM Assembly Automation Ltd, Hong Kong, HK;
Abstract
A system for maintaining thermal stability of a motion stage driven by a motor comprises a motion current generator operative to produce a motion current to drive the motion stage to move and a thermal current generator operative to produce a thermal current to dissipate heat in the motion stage for controlling a temperature of the motion stage without producing corresponding movement of the motion stage. A summation controller is operative to combine the motion current with the thermal current, and to produce a combined current output to the motor.