The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2012
Filed:
Jan. 30, 2009
Applicants:
Seitarou Hattori, Tokyo, JP;
Manabu Sekiguchi, Tokyo, JP;
Terukazu Kokubo, Tokyo, JP;
Kentaro Tamaki, Tokyo, JP;
Tsuyoshi Furukawa, Tokyo, JP;
Taichi Matsumoto, Tokyo, JP;
Chiaki Miyamoto, Tokyo, JP;
Inventors:
Seitarou Hattori, Tokyo, JP;
Manabu Sekiguchi, Tokyo, JP;
Terukazu Kokubo, Tokyo, JP;
Kentaro Tamaki, Tokyo, JP;
Tsuyoshi Furukawa, Tokyo, JP;
Taichi Matsumoto, Tokyo, JP;
Chiaki Miyamoto, Tokyo, JP;
Assignee:
JSR Corporation, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of forming a trench isolation, comprising the steps of: