The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2012
Filed:
Nov. 09, 2009
Applicants:
Vinh Luong, Albany, NY (US);
Akiteru Ko, Schenectady, NY (US);
Inventors:
Vinh Luong, Albany, NY (US);
Akiteru Ko, Schenectady, NY (US);
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01B 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A liner removal process is described, wherein an excess portion of a conformal liner formed in a trench is substantially removed while reducing or minimizing damage to a bulk fill material in the trench.
Luong, Vinh. (2012). Deep trench liner removal process (U.S. Patent No. 8313661). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8313661
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile