The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2012
Filed:
Dec. 15, 2009
Igor V. Fomenkov, San Diego, CA (US);
Alexander I. Ershov, Escondido, CA (US);
William N. Partlo, Poway, CA (US);
Jason Paxton, San Diego, CA (US);
Nam-hyong Kim, San Diego, CA (US);
Jerzy R. Hoffman, Montebello, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Alexander I. Ershov, Escondido, CA (US);
William N. Partlo, Poway, CA (US);
Jason Paxton, San Diego, CA (US);
Nam-Hyong Kim, San Diego, CA (US);
Jerzy R. Hoffman, Montebello, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A method for producing extreme ultraviolet light includes producing a target material at a target location; supplying pump energy to a gain medium of at least one optical amplifier that has an amplification band to produce an amplified light beam; propagating the amplified light beam through the gain medium using one or more optical components of a set of optical components; delivering the amplified light beam to the target location using one or more optical components of the optical component set; producing with a guide laser a guide laser beam that has a wavelength outside of the amplification band of the gain medium and inside the wavelength range of the optical components; and directing the guide laser beam through the optical component set to thereby align one or more optical components of the optical component set.