The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 30, 2012

Filed:

Nov. 14, 2007
Applicants:

Veeraraghavan S Basker, Albany, NY (US);

Toshiharu Furukawa, Essex Junction, VT (US);

Mark C Hakey, Fairfax, VT (US);

Steven J Holmes, Guilderland, NY (US);

Charles W Koburger, Iii, Delmar, NY (US);

Krishna V Singh, Hillsboro, OR (US);

Inventors:

Veeraraghavan S Basker, Albany, NY (US);

Toshiharu Furukawa, Essex Junction, VT (US);

Mark C Hakey, Fairfax, VT (US);

Steven J Holmes, Guilderland, NY (US);

Charles W Koburger, III, Delmar, NY (US);

Krishna V Singh, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/34 (2006.01);
U.S. Cl.
CPC ...
Abstract

Disclosed are embodiments of an improved semiconductor wafer structure having protected clusters of carbon nanotubes (CNTs) on the back surface and a method of forming the improved semiconductor wafer structure. Also disclosed are embodiments of a semiconductor module with exposed CNTs on the back surface for providing enhanced thermal dissipation in conjunction with a heat sink and a method of forming the semiconductor module using the disclosed semiconductor wafer structure.


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