The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Mar. 24, 2010
Robert P. Akins, Escondido, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Matthew R. Graham, San Diego, CA (US);
Kevin W. Zhang, San Diego, CA (US);
Patrick L. Nelissen, Ramona, CA (US);
Robert P. Akins, Escondido, CA (US);
Richard L. Sandstrom, Encinitas, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Matthew R. Graham, San Diego, CA (US);
Kevin W. Zhang, San Diego, CA (US);
Patrick L. Nelissen, Ramona, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.