The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
May. 07, 2010
Applicants:
Hiroyuki Kashiwagi, Fujisawa, JP;
Kazuya Fukuhara, Tokyo, JP;
Inventors:
Hiroyuki Kashiwagi, Fujisawa, JP;
Kazuya Fukuhara, Tokyo, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/01 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for inspecting a nano-imprint template, includes irradiating light onto a template for nano-imprinting from a back surface side of the template, the template having a front surface where a pattern is formed, detecting near-field light which is generated near the front surface of the template by the irradiation of the light, and performing an inspection of the template on the basis of the detected near-field light.
Kashiwagi, Hiroyuki. (2012). Method for inspecting nano-imprint template (U.S. Patent No. 8294889). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8294889
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile