The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Apr. 07, 2011
Masato Moriya, Hiratsuka, JP;
Tamotsu Abe, Hiratsuka, JP;
Takashi Suganuma, Hiratsuka, JP;
Hiroshi Someya, Hiratsuka, JP;
Takayuki Yabu, Hiratsuka, JP;
Akira Sumitani, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Masato Moriya, Hiratsuka, JP;
Tamotsu Abe, Hiratsuka, JP;
Takashi Suganuma, Hiratsuka, JP;
Hiroshi Someya, Hiratsuka, JP;
Takayuki Yabu, Hiratsuka, JP;
Akira Sumitani, Hiratsuka, JP;
Osamu Wakabayashi, Hiratsuka, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
An EUV light source apparatus can reliably detect and accurately judge deterioration of an optical element in a laser beam focusing optics disposed within an EUV light generation chamber. This EUV light source apparatus includes: the EUV light generation chamber; a target material supply unit; an EUV light collector mirror; a driver laser; a window; a parabolic mirror which focuses collimated laser beam by reflection and is disposed within the EUV light generation chamber; an energy detector detecting energy of the laser beam diffused without being applied to a target material after being focused by the laser beam focusing optics when the EUV light is not generated; and a processing unit for judging the deterioration of the window and the parabolic mirror according to the laser beam energy detected by the energy detector.