The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2012
Filed:
Sep. 24, 2010
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
Vadim Yevgenyevich Banine, Deurne, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Evgeny Dmitrievich Korop, Troitsk, RU;
Konstantin Nikolaevich Koshelev, Troitsk, RU;
Yurii Victorovitch Sidelnikov, Troitsk, RU;
Oleg Yakushev, Korolev, RU;
Vladimir Mihailovitch Krivtsun, Troitsk, RU;
Vadim Yevgenyevich Banine, Deurne, NL;
Vladimir Vitalevich Ivanov, Moscow, RU;
Evgeny Dmitrievich Korop, Troitsk, RU;
Konstantin Nikolaevich Koshelev, Troitsk, RU;
Yurii Victorovitch Sidelnikov, Troitsk, RU;
Oleg Yakushev, Korolev, RU;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An apparatus for forming a beam of electromagnetic radiation. The apparatus includes a plasma radiation source, a foil trap provided with a plurality of thin foils that extend substantially parallel to the direction of radiation from the plasma source, and a grid disposed between the plasma radiation source and the foil trap. A space is located between the grid and the foil trap. An electrical potential application circuit is constructed and arranged to apply an electrical potential to the grid so that the grid repels electrons emitted by the plasma radiation source and creates a positive space charge between the grid and the foil trap to deflect ions emitted by the plasma radiation source to the foil trap. A distance between the grid and the foil trap is at least equal to one-half of a radius of the foil trap.